Prediction and Validation of Chaotic Behavior in an Electrostatically Actuated Microelectromechanical Oscillator

Author

DeMartini, B.E. ; Butterfield, H.E. ; Moehlis, J. ; Turner, K.L.

Author_Institution

Dept. of Mech. Eng., Univ. of California, Santa Barbara, CA

fYear

2007

fDate

10-14 June 2007

Firstpage

1697

Lastpage

1700

Abstract

We investigate chaotic behavior for a microelectromechanical (MEM) oscillator, which is modeled by a version of the Mathieu equation that contains both linear and nonlinear time varying stiffness coefficients. By using Melnikov´s method we have developed a criterion for the existence of chaos in such oscillators, which depends solely on system parameters. Chaotic behavior was observed experimentally and numerically for a MEM oscillator developed using the criterion from our analysis.

Keywords

chaos; electrostatic actuators; micromechanical devices; parametric oscillators; MEM; Mathieu equation; Melnikov method; chaotic behavior; electrostatically actuated microelectromechanical oscillator; time varying stiffness coefficients; AC generators; Chaos; DC generators; Electrostatic analysis; Frequency; Nonlinear dynamical systems; Nonlinear equations; Oscillators; Signal generators; Tuning; Melnikov´s method; chaos; nonlinear dynamics; parametric resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0841-5

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300478

Filename

4300478