Novel Magnetic-Acoustic Face Shear Mode Resonators for Liquid Property Sensing

In this contribution, we report on the electromagnetic excitation of acoustic face shear mode (FSM) resonators for liquid property sensing. A variety of non-piezoelectric transducer materials have been investigated with regard to optimal vibration modes for different sensor applications and the efficiency of the electromagnetic excitation. For liquid phase sensing, we have found circular face shear mode resonators to be most sensitive to fluid properties, e.g., density and viscosity, while radial flexural plate modes excite compressional waves and are thus most sensitive to fluid volume, or rather the distance to the liquid surface. Experimental results have been compared with an FEM eigenmode analysis for a better understanding of the generated acoustic waves.