Title :
Adjustable Force Coupled Sensor-Actuator System for Low Frequency Resonant Vibration Detection
Author :
Forke, R. ; Scheibner, D. ; Mehner, J. ; Gessner, T. ; Dötzel, W.
Author_Institution :
Chemnitz Univ. of Technol., Chemnitz
Abstract :
The paper reports on a novel micro-electro-mechanical (MEM) sensor-actuator system for adjustable resonant vibration detection at frequencies below 1 kHz. The MEM system operates at standard pressure and utilizes the superheterodyne principle well known from information technologies. By mixing the low frequency vibration with a high frequency carrier, the information of the vibration is transformed into a higher frequency range. A resonant oscillator amplifies and filters the information.
Keywords :
heterodyne detection; microactuators; microsensors; oscillators; vibrations; force coupled sensor-actuator system; high frequency carrier; information technology; low frequency adjustable resonant vibration detection; low frequency vibration; microelectromechanical sensor-actuator system; resonant oscillator amplifier; resonant oscillator filters; superheterodyne principle; Chemical technology; Electrostatics; Force sensors; Oscillators; Resonance; Resonant frequency; Sensor systems; Transducers; Vibrations; Wideband; force coupling; superheterodyne principle; vibration detection;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0841-5
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300485
