Title :
A novel simple oxide isolation process to fabricate high performance VCSEL arrays
Author :
Giaretta, Giorgio ; Yuen, W. ; Aronson, L. ; Lemoff, B. ; Chang-Hasnain, Connie J.
Author_Institution :
University of California Berkeley
Keywords :
Apertures; Bit error rate; Gold; Optical arrays; Optical device fabrication; Optical signal processing; Oxidation; Semiconductor laser arrays; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
DOI :
10.1109/CLEO.1997.602461