DocumentCode
337974
Title
New results on surface transverse wave resonators built with different combinations of groove and strip gratings
Author
Ballandras, S. ; Bigler, E. ; Daniau, W. ; Py, J. ; Pakfar, A. ; Marianneau, G. ; Martin, G.
Author_Institution
Univ. de Franche-Comte, Besancon, France
Volume
1
fYear
1998
fDate
1998
Firstpage
217
Abstract
Combined strip and groove grating have been studied for the fabrication of Surface Transverse Wave (STW) resonators. Recessed and protruding metal strip structure have been tested and used to build 200 and 500 MHz devices. Their main characteristics have been systematically measured to determine their evolution versus geometries of the gratings. Finally, the temperature sensitivity of these resonators has been measured and compared to theoretical predictions taking into account strip height or groove depth
Keywords
surface acoustic wave resonators; 200 MHz; 500 MHz; groove grating; metal strip structure; strip grating; surface transverse wave resonator; temperature sensitivity; Fabrication; Gratings; Insertion loss; Q factor; Reproducibility of results; Resonant frequency; Strips; Surface waves; Temperature sensors; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location
Sendai
ISSN
1051-0117
Print_ISBN
0-7803-4095-7
Type
conf
DOI
10.1109/ULTSYM.1998.762132
Filename
762132
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