Title :
Alumina MEMS Platform for Impulse Semiconductor and IR Optic Gas Sensors
Author :
Vasiliev, A.A. ; Pavelko, R.G. ; Gogish-Klushin, S.Yu. ; Kharitonov, D.Yu. ; Gogish-Klushina, O.S. ; Sokolov, A.V. ; Samotaev, N.N.
Author_Institution :
Univ. Rovira i Virgili, Tarragona
Abstract :
In the presentation, we discuss the application of a novel MEMS technology based on a fabrication of thin alumina film (TAF). The membrane is fabricated by the electrolyte spark oxidation of aluminum. The membrane consists of nano-crystalline gamma-aluminum oxide and has a thickness of 10 - 30 microns. It was shown that this membrane chip can be used for the fabrication of gas sensors (semiconductor, thermocatalytic, and optic) operating in impulse regime. The thermal response time of the heater is of about 80 ms, the chip remains working after 7 millions on-off cycles at 450degC.
Keywords :
electrolytes; fibre optic sensors; gas sensors; microsensors; IR optic gas sensors; MEMS technology; alumina MEMS platform; electrolyte spark oxidation; impulse semiconductor gas sensors; membrane chip; nanocrystalline gamma-aluminum oxide; temperature 450 C; thermal response time; thin alumina film; Aluminum; Biomembranes; Gas detectors; Micromechanical devices; Optical device fabrication; Optical films; Optical sensors; Oxidation; Semiconductor films; Sparks; MEMS; TAF; Thin alumina film; optic gas sensor; semiconductor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300563
