DocumentCode
3380946
Title
A Bi-Stable Latchable PDMS Valve Employing Low Melting Temperature Metal Alloys
Author
Shaikh, Kashan A. ; Liu, Chang
Author_Institution
Univ. of Illinois at Urbana-Champaign Urbana, Urbana
fYear
2007
fDate
10-14 June 2007
Firstpage
2199
Lastpage
2202
Abstract
We present a latchable micro-valve that is stable with zero power input in both the closed and open positions. A low melting temperature metal alloy provides the latching mechanism for the polydimethylsiloxane (PDMS) membrane valve. At room temperature the metal alloy is solid and physically holds the valve in the closed or open state. Heating the alloy above 62 degC liquefies it and allows the valve state to be switched. When latched closed the valve is able to maintain a tight seal up to 20 psi (138 kPa) fluid back pressure.
Keywords
alloys; microvalves; bistable latchable PDMS valve; latchable microvalve; low melting temperature metal alloy; polydimethylsiloxane membrane valve; Actuators; Solid state circuits; Temperature; Transducers; Valves; Latchable Valve; Polydimethylsiloxane; Thermopneumatic;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300604
Filename
4300604
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