DocumentCode :
3381011
Title :
Solidly mounted bulk acoustic wave filters for the GHz frequency range
Author :
Loebl, H.P. ; Metzmacher, C. ; Peligrad, D.N. ; Mauczok, R. ; Klee, M. ; Brand, W. ; Milsorn, R.F. ; Lok, P. ; van Straten, F. ; Tuinhout, A. ; Lobeek, J.W.
Author_Institution :
Philips Res. Lab., Aachen, Germany
Volume :
1
fYear :
2002
fDate :
8-11 Oct. 2002
Firstpage :
919
Abstract :
Small sized, highly selective solidly mounted bulk acoustic wave (BAW) band pass filters are suitable for mobile and wireless systems operating in the frequency range 0.8 and 10 GHz. Both lattice and ladder BAW resonator filters have been designed and fabricated on 6" wafers using multilayer Bragg type acoustic reflectors. For the piezoelectric film highly oriented AlN has been deposited using an optimised sputter process. Resonators and filters were made and measured both on glass and silicon wafers. Resonators on glass and Si show different substrate loss. Dielectric loss in the AlN piezo-layer is small. The acoustic loss is found to be small in all the materials. The properties of the acoustic reflector can be monitored by a thorough examination of small details of the resonator\´s frequency response. Resonator and filter examples are shown for 2 GHz, 2.8 GHz, and 8 GHz.
Keywords :
acoustic resonator filters; aluminium compounds; band-pass filters; bulk acoustic wave devices; ladder filters; lattice filters; mobile handsets; piezoelectric thin films; 0.8 to 10 GHz; 2 GHz; 2.8 GHz; 8 GHz; AlN; Si; Si wafer; acoustic loss; dielectric loss; frequency response; glass wafer; highly oriented AlN; ladder BAW resonator filters; lattice BAW resonator filters; mobile systems; multilayer Bragg type acoustic reflectors; piezoelectric film; solidly mounted bulk acoustic wave band pass filters; substrate loss; wireless systems; Acoustic reflection; Acoustic waves; Band pass filters; Dielectric losses; Dielectric substrates; Frequency; Glass; Lattices; Nonhomogeneous media; Resonator filters;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-7582-3
Type :
conf
DOI :
10.1109/ULTSYM.2002.1193546
Filename :
1193546
Link To Document :
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