DocumentCode :
3381067
Title :
A critical re-evaluation of the usefulness of R-D framework in predicting NBTI stress and recovery
Author :
Mahapatra, S. ; Islam, A.E. ; Deora, S. ; Maheta, V.D. ; Joshi, K. ; Jain, A. ; Alam, M.A.
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India
fYear :
2011
fDate :
10-14 April 2011
Abstract :
Reaction-Diffusion (R-D) framework for interface trap generation along with hole trapping in pre-existing and generated bulk oxide traps are used to model Negative Bias Temperature Instability (NBTI) in differently processed SiON p-MOSFETs. Time, temperature and bias dependent degradation and recovery transients are predicted. Long-time power law exponent of DC degradation and uniquely renormalized duty cycle and frequency dependent AC degradation data from a wide range of sources are shown to have universal features and a broad consensus across industry/academia. These universal features can also be predicted using the classical R-D framework.
Keywords :
MOSFET; hole traps; interface states; reaction-diffusion systems; semiconductor device models; semiconductor device reliability; DC degradation; NBTI recovery; NBTI stress; R-D framework; SiON; degradation transient; frequency dependent AC degradation; generated bulk oxide trap; hole trapping; interface trap generation; long-time power law exponent; negative bias temperature instability; p-MOSFET; reaction-diffusion framework; recovery transient; renormalized duty cycle; Charge carrier processes; Degradation; Logic gates; Predictive models; Stress; Stress measurement; Time measurement; NBTI; R-D model; SiON p-MOSFETs; bulk traps; hole trapping; interface traps;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium (IRPS), 2011 IEEE International
Conference_Location :
Monterey, CA
ISSN :
1541-7026
Print_ISBN :
978-1-4244-9113-1
Electronic_ISBN :
1541-7026
Type :
conf
DOI :
10.1109/IRPS.2011.5784544
Filename :
5784544
Link To Document :
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