Micro Fabrication of SiC Mesoscale Lean Direct Injector Array: Toward Active Combustion Control

We report the first utilization of microelectromechanical systems (MEMS) fabrication technology to implement a mesoscale fuel injector array in silicon carbide (SiC) substrate material. A combination of deep reactive ion etching (DRIE), ultrasonic micromachining, silicon loss-molding, and diffusion bonding of multiple SiC substrates was applied to fabricate the first generation 7times7-4 array injector platform. Arrayed spray patterns were demonstrated in water to determine the degree of atomization prior to fuel spray and combustion analyses. The primary objectives of this effort are: a) develop the foundational SiC platform injector array technology for use in gas turbine engines, b) use such technology to decrease combustion instabilities by active control of combustion processes.