Title :
A high-resolution and fast-conversion readout circuit for differential capacitive sensors
Author :
Woo, Jong-Kwan ; Lee, Hyunjoong ; Ahn, Sungho ; Kim, Suhwan
Author_Institution :
Electr. Eng. & Inter-Univ. Semicond. Res. Center, Seoul Nat. Univ., Seoul, South Korea
Abstract :
Our readout integrated circuit (ROIC) for differential capacitive sensors, such as thin-membrane transducer, uses current switching and time-domain based technique to measure the difference between the capacitance of the sensing and reference more rapidly, while maintaining accuracy. The 12-bit ROIC is designed and fabricated in a 0.35μm digital CMOS bulk technology.
Keywords :
CMOS integrated circuits; capacitive sensors; differentiating circuits; readout electronics; time-domain analysis; current switching; differential capacitive sensor; digital CMOS bulk technology; fast-conversion readout circuit; high-resolution readout circuit; readout integrated circuit; size 0.35 mum; thin-membrane transducer; time-domain based technique; word length 12 bit; CMOS integrated circuits; Capacitance; Clocks; Delay; Synchronization;
Conference_Titel :
SOC Conference (SOCC), 2010 IEEE International
Conference_Location :
Las Vegas, NV
Print_ISBN :
978-1-4244-6682-5
DOI :
10.1109/SOCC.2010.5784638
