Title :
Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy
Author :
Mouaziz, S. ; Imboden, C. ; Santschi, C. ; Mena, O. Vazquez ; Popovic, R. ; Brugger, J. ; Boero, G.
Author_Institution :
Ecole Polytech. Federate de Lausanne (EPFL), Lausanne
Abstract :
We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1 x 1 mum 2 show a magnetic field resolution better than 1 /n muT / Hz 1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.
Keywords :
Hall effect transducers; cantilevers; magnetic field effects; scanning probe microscopy; thermal noise; SU-8 cantilever; integrated nickel micronano-Hall sensor; magnetic field resolution; magnetic imaging; scanning Hall probe microscopy; thermal noise; Active noise reduction; Fabrication; Frequency; Hall effect devices; Magnetic noise; Magnetic sensors; Microscopy; Nickel; Sensor phenomena and characterization; Thermal sensors; Magnetic field sensors; SU-8; scanning Hall probe microscopy;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300701
