DocumentCode
3382820
Title
A Low-Cost and Highly Integrated Fiber Optical Pressure Sensor System
Author
Ceyssens, F. ; Driesen, M. ; Wouters, K. ; Puers, R.
Author_Institution
K ULeuven, Leuven
fYear
2007
fDate
10-14 June 2007
Firstpage
2601
Lastpage
2604
Abstract
This paper presents a simple fiber-optic based pressure measurement system, in which both sensor and readout parts are constructed using batch micromachining techniques, supplemented with some straightforward assembly steps. Prototypes of relative and absolute pressure sensors parts and a readout part have been realized. Goal of this research is to enable deployment of such harsh environment sensors in high-volume, low-cost applications.
Keywords
fibre optic sensors; micromachining; pressure sensors; absolute pressure sensors; fiber optical pressure sensor system; fiber-optic based pressure measurement system; micromachining techniques; Biomembranes; Fabry-Perot; Integrated optics; Optical fiber sensors; Optical fibers; Optical interferometry; Optical modulation; Optical sensors; Optical waveguides; Sensor systems; Optical sensors; pressure sensors; waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300704
Filename
4300704
Link To Document