Title :
Analysis of electrical test data using a neural network approach
Author :
Koppenhoefer, B. ; Wuerthner, S. ; Ludwig, L. ; Rosenstiel, W. ; Kuge, H.-H. ; Hummel, M. ; Federl, P.
Author_Institution :
Inst. fur Organische Chem., Tubingen, Germany
Abstract :
This project aims at the development of new and fast tools helping to interpret the results of electrical measurements of chips (functional data) and of test structures between the chips, the so called process control monitors (PCM). The goal is to recognize and classify deviations in these results as soon as they become available so that process corrections can be implemented more quickly
Keywords :
data analysis; integrated circuit testing; process control; self-organising feature maps; SOM; electrical test data analysis; functional data; neural network; process control monitor; semiconductor manufacturing; Chemical technology; Data analysis; Electric variables measurement; Fingerprint recognition; Manufacturing processes; Neural networks; Phase change materials; Productivity; Semiconductor device manufacture; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-4050-7
DOI :
10.1109/ASMC.1997.630702
