Investigation of optical crosstalk in monolithically integrated photodetectors arrays for multichannel detection systems

Author

Purica, Munizer ; Budianu, Elena ; Cristea, Dana ; Rusanu, A.

Author_Institution

Nat. Inst. for Res. & Dev. of Microtechnol., Bucharest, Romania

Volume

2

fYear

1999

fDate

36434

Firstpage

503

Abstract

The paper presents an investigation of optical crosstalk for monolithically integrated photodiodes arrays based on lateral collection of photogenerated carriers in the optical active layer of semiconductor substrate. The analysis gives the possibility to optimize the photodetectors structures in order to reduce the crosstalk in array independently of semiconductor substrate. Two types of photodiodes arrays were experimented on silicon with rectangular geometry of 200/200 μm having a minimum crosstalk (~10^-4) for 0.9 μm radiation wavelength

Keywords

elemental semiconductors; integrated optics; optical arrays; optical crosstalk; optical signal detection; photodetectors; photodiodes; silicon; 0.9 micron; Si; monolithic integration; multichannel detection; optical crosstalk; photodetector array; semiconductor substrate; silicon photodiode; Geometrical optics; Lighting; Optical arrays; Optical coupling; Optical crosstalk; Optical noise; Optical sensors; Photodetectors; Photodiodes; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International

Conference_Location

Sinaia

Print_ISBN

0-7803-5139-8

Type

conf

DOI

10.1109/SMICND.1999.810595

Filename

810595