Title :
ASMC 2003. 14th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) 2003. (Cat. No.03CH37406)
fDate :
March 31 2003-April 1 2003
Abstract :
The following topics are dealt with: defect management; process control; industrial engineering; advanced process technology; yield management; and equipment productivity.
Keywords :
integrated circuit manufacture; integrated circuit technology; integrated circuit yield; process control; production; semiconductor device manufacture; semiconductor technology; advanced process technology; defect management; equipment productivity; industrial engineering; process control; yield management;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
Conference_Location :
Munich, Germany
Print_ISBN :
0-7803-7681-1
DOI :
10.1109/ASMC.2003.1194458
