• DocumentCode
    3390502
  • Title

    Guided analytic application for interactive flash memory Vt and I-V classification using Spotfire DecisionSite

  • Author

    Shetty, Shivananda ; Hopper, C. Bradford

  • Author_Institution
    AMD, Submicron Dev. Center, Sunnyvale, CA, USA
  • fYear
    2003
  • fDate
    31 March-1 April 2003
  • Firstpage
    215
  • Lastpage
    224
  • Abstract
    This paper describes techniques to classify I-V curves and analyze resulting Vt distributions using interactive analytical tools developed and deployed for that purpose on a guided analytics platform called DecisionSite, from Spotfire Inc. An interaction between transistor performance and physical layout was characterized using these methods, and layout changes implemented to reduce this effect have significantly increased the level and consistency of device yield for a new flash memory product. The method for analysis has been encapsulated in a process guide, which facilitates sharing this best practice method with other engineering personnel through a centralized DecisionSite server.
  • Keywords
    electronic engineering computing; flash memories; integrated circuit layout; integrated circuit yield; integrated memory circuits; manufacturing data processing; I-V curve classification; Spotfire DecisionSite; Vt distributions; centralized DecisionSite server; flash memory product; guided analytic application; interactive flash memory; physical layout; process guide; threshold voltage classification; transistor performance; Best practices; Business; Flash memory; Information retrieval; Manufacturing processes; Performance analysis; Personnel; Process control; Read-write memory; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
  • ISSN
    1078-8743
  • Print_ISBN
    0-7803-7681-1
  • Type

    conf

  • DOI
    10.1109/ASMC.2003.1194495
  • Filename
    1194495