DocumentCode
3390502
Title
Guided analytic application for interactive flash memory Vt and I-V classification using Spotfire DecisionSite
Author
Shetty, Shivananda ; Hopper, C. Bradford
Author_Institution
AMD, Submicron Dev. Center, Sunnyvale, CA, USA
fYear
2003
fDate
31 March-1 April 2003
Firstpage
215
Lastpage
224
Abstract
This paper describes techniques to classify I-V curves and analyze resulting Vt distributions using interactive analytical tools developed and deployed for that purpose on a guided analytics platform called DecisionSite, from Spotfire Inc. An interaction between transistor performance and physical layout was characterized using these methods, and layout changes implemented to reduce this effect have significantly increased the level and consistency of device yield for a new flash memory product. The method for analysis has been encapsulated in a process guide, which facilitates sharing this best practice method with other engineering personnel through a centralized DecisionSite server.
Keywords
electronic engineering computing; flash memories; integrated circuit layout; integrated circuit yield; integrated memory circuits; manufacturing data processing; I-V curve classification; Spotfire DecisionSite; Vt distributions; centralized DecisionSite server; flash memory product; guided analytic application; interactive flash memory; physical layout; process guide; threshold voltage classification; transistor performance; Best practices; Business; Flash memory; Information retrieval; Manufacturing processes; Performance analysis; Personnel; Process control; Read-write memory; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
ISSN
1078-8743
Print_ISBN
0-7803-7681-1
Type
conf
DOI
10.1109/ASMC.2003.1194495
Filename
1194495
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