DocumentCode
3390809
Title
A pragmatic approach to managing APC FDC in high volume logic production
Author
Joyce-Wohrmann, R.
Author_Institution
Infineon Technol. AG, Regensburg, Germany
fYear
2003
fDate
31 March-1 April 2003
Firstpage
303
Abstract
At Infineon Technologies APC fault detection is now implemented in many process areas in its high volume fabs. With the APC Software "APC-Trend" process engineers and maintenance can detect and classify anomalies in machine and process parameters and supervise them on the basis of an automated alarming system. An overview of the current usage of APC FDC at Infineon is given.
Keywords
fault diagnosis; integrated circuit manufacture; process control; APC FDC management; APC-Trend software; IC manufacturing; Infineon Technologies; automated alarming system; fault detection; high volume logic production; semiconductor fab; Automatic control; Engineering management; Etching; Fault detection; Large scale integration; Logic; Plasma measurements; Production; Software maintenance; Software tools;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
ISSN
1078-8743
Print_ISBN
0-7803-7681-1
Type
conf
DOI
10.1109/ASMC.2003.1194511
Filename
1194511
Link To Document