DocumentCode
339329
Title
Investigation of a gas thermal desorption mechanism in the course of film sputtering for optical waveguides
Author
Orlikov, L.N. ; Orlikov, N.L. ; Shandarov, S.M.
Author_Institution
chair Electron devices
Volume
1
fYear
1999
fDate
18-20 May 1999
Firstpage
39
Lastpage
41
Keywords
Electron optics; Gases; Lithium niobate; Optical films; Optical sensors; Optical surface waves; Optical waveguides; Sputtering; Temperature dependence; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Application of the Conversion Research Results for International Cooperation, 1999. SIBCONVERS '99. The Third International Symposium
Conference_Location
Tomsk, Russia
Print_ISBN
0-7803-5172-X
Type
conf
DOI
10.1109/SIBCON.1999.771750
Filename
771750
Link To Document