Title :
Etching of pliezoelectrics in a metal-bearing plasma, scanned over the aurface
Author :
Orlikov, L.N. ; Shangin, A.S. ; Shandarov, S.M.
Keywords :
Circuits; Dielectric materials; Etching; Frequency; Lithium niobate; Plasma applications; Plasma temperature; Pulse generation; Surface discharges; Voltage;
Conference_Titel :
Application of the Conversion Research Results for International Cooperation, 1999. SIBCONVERS '99. The Third International Symposium
Print_ISBN :
0-7803-5172-X
DOI :
10.1109/SIBCON.1999.771751
