DocumentCode
3395684
Title
Assessment of a 90nm PMOS NBTI in the form of products failure rate
Author
Masuda, Hiroo ; Pierce, Donald G. ; Nishitsuru, Kazunori ; Machida, Ken
Author_Institution
Semicond. Technol. Acad. Res. Center, Yokohama, Japan
fYear
2005
fDate
4-7 April 2005
Firstpage
89
Lastpage
94
Abstract
NBTI is known to be the most critical MOS reliability issue for ppb-level product failures in giga-transistor integrated systems. A new assessment on 90 nm PMOS NBTI is presented. The new metric is based on product failure rate, which takes into account product integration. In a 90 nm technology, the product level failure rate (hazard rate) is estimated to be 3E-3 FIT @ worst case environmental conditions of 125°C and +10% Vdd. The 1 FIT lifetime is estimated to be 15 years. Degradation during burn-in test is less important since the failure rate saturates for long stress times. The assumed lognormal distribution of NBTI lifetime remains as a discussion issue.
Keywords
MOS integrated circuits; integrated circuit reliability; log normal distribution; semiconductor device reliability; 125 degC; 15 year; 90 nm; MOS reliability; PMOS NBTI; burn-in test; giga-transistor integrated systems; hazard rate; lognormal distribution; ppb-level product failures; product failure rate; product integration; stress times; Degradation; Hazards; Human computer interaction; Life estimation; Lifetime estimation; Niobium compounds; Semiconductor device reliability; Stress; Testing; Titanium compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Print_ISBN
0-7803-8855-0
Type
conf
DOI
10.1109/ICMTS.2005.1452231
Filename
1452231
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