Title :
A simple and accurate capacitance ratio measurement technique for integrated circuit capacitor arrays
Author :
Ning, Zhenqiu ; De Schepper, Luc ; Delecourt, H.-X. ; Gillon, Renaud ; Tack, Marnix
Author_Institution :
AMI Semicond. Belgium bvba, Oudenaarde, Belgium
Abstract :
The key performance of many analogue circuits is directly dependent on precise capacitance ratios. To perform an accurate characterization of nonunity capacitor ratios, a floating-gate AC nulling technique is proposed. A test-structure containing the floating-gate and a binary-weighted capacitor array has been designed, fabricated and tested in the AMIS C035 process. The technique is proven to be accurate, robust and easy to use.
Keywords :
CMOS analogue integrated circuits; capacitance measurement; characteristics measurement; integrated circuit design; integrated circuit testing; CMOS technologies; analogue circuits; binary-weighted capacitor array; capacitance ratio measurement technique; floating-gate AC nulling technique; integrated circuit capacitor arrays; test chip design; test-structure; Ambient intelligence; Analog integrated circuits; Circuit testing; MOS capacitors; MOS devices; Measurement techniques; Parasitic capacitance; Robustness; Software testing; Switches;
Conference_Titel :
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Print_ISBN :
0-7803-8855-0
DOI :
10.1109/ICMTS.2005.1452251
