Comparative study of electrical properties of PbLaZrTiOx capacitors with Al-doped ZnO and ITO top electrodes

Author

Takada, Yasuhiro ; Tsuji, Takao ; Okamoto, N. ; Saito, Takashi ; Kondo, K. ; Yoshimura, Tetsuzo ; Fujimura, Naoki ; Higuchi, Kenichi ; Kitajima, A. ; Oshima, Akihiro

Author_Institution

Dept. of Chem. Eng., Osaka Prefecture Univ., Sakai, Japan

fYear

2013

fDate

21-25 July 2013

Firstpage

360

Lastpage

362

Abstract

PbLaZrTiOx (PLZT) thin films were deposited on Pt(111) substrate by the sol-gel method, then aluminum-doped zinc oxide (AZO) and indium tin oxide (ITO) top electrodes were deposited by pulsed laser deposition (PLD). We evaluated degradation characteristics by 3% hydrogen atmosphere annealing in 200°C, 1Torr. The polarization ratio of PLZT capacitors with 200 nm top electrodes thickness was maximum value at the same Pb contents. We also evaluated fatigue behavior by applying 10 V, 100 μs pulse width and 1 ms interval cycles. PLZT capacitors with AZO and ITO top electrodes were robust electrodes over 10⁵ cycles compared with Pt top electrodes.

Keywords

aluminium; annealing; electrodes; fatigue; ferroelectric capacitors; ferroelectric thin films; indium compounds; lanthanum compounds; lead compounds; pulsed laser deposition; sol-gel processing; zinc compounds; zirconium compounds; ITO; PbLaZrTiO_x; PbLaZrTiO_x capacitors; Pt; Pt(111) substrate; ZnO:Al; degradation characteristics; electrical properties; electrodes; fatigue; hydrogen atmosphere annealing; polarization ratio; pressure 1 torr; pulsed laser deposition; sol-gel method; temperature 200 degC; thin films; voltage 10 V; Annealing; Educational institutions; Laser applications; Power lasers; Radio frequency; conductive oxide electrode; fatigue; ferroelectric capacitor; hydrogen degradation; pulsed laser deposition;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the

Conference_Location

Prague

Type

conf

DOI

10.1109/ISAF.2013.6748710

Filename

6748710