Title :
Enhanced large signal performance of PZT thick film actuators for active micro-optics
Author :
Ernst, Damien ; Bramlage, Bernhard ; Gebhardt, S. ; Schonecker, A. ; Pabst, O. ; Schreiner, Hans-Jurgen
Author_Institution :
Fraunhofer Inst. for Ceramic Technol. & Syst. (IKTS), Dresden, Germany
Abstract :
Screen-printed lead zirconate titanate (PZT) thick film actuators are beneficial for miniaturized devices due to their flat profile and accurate net-shaped fabrication. Sintering progress and piezoelectric performance depend on the type and amount of sintering additive. Cantilever structures were fabricated by the use of screen printing technology with a systematic variation of the sintering additive content and for two different piezoceramic base materials. Their microstructure, small and large signal properties were characterized. Based on the experimental data we developed an actuator frame to lift a micro-lens array within a low-profile microscope by 115 μm.
Keywords :
additives; cantilevers; lead compounds; microactuators; microlenses; piezoceramics; sintering; thick film devices; PZT; PZT thick film actuators; active micro-optics; cantilever structures; enhanced large signal performance; low-profile microscope; microlens array; microstructure; net-shaped fabrication; piezoceramic base materials; piezoelectric performance; screen-printed lead zirconate titanate; signal properties; sintering additive; sintering progress; Actuators; Displacement measurement; Fabrication; Films; Substrates; Actuator; Cantilever; PZT; Screen Printing; Thick Film;
Conference_Titel :
Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the
Conference_Location :
Prague
DOI :
10.1109/ISAF.2013.6748714
