• DocumentCode
    3397995
  • Title

    MEMS macromodels construction method

  • Author

    Ladogubets, V.V. ; Beznosyk, A.Y. ; Finogenov, A.D. ; Tchkalov, A.V.

  • Author_Institution
    Nat. Tech. Univ. of Ukraine "KPI", Kiev
  • fYear
    2008
  • fDate
    8-12 Sept. 2008
  • Firstpage
    147
  • Lastpage
    148
  • Abstract
    It is offered to use a finite-element mathematic model for receiving the equivalent electrical circuit of mechanical components. The given approach is spread on getting the equivalent circuits for MEMS components. To reduce dimensions of the circuits received it is proposed to use the RLC-reduction. The example of getting micro-accelerometerpsilas equivalent electrical circuit is considered.
  • Keywords
    accelerometers; equivalent circuits; finite element analysis; micromechanical devices; MEMS; RLC reduction; equivalent electrical circuit; finite-element mathematic model; macromodel construction method; mechanical components; micro-accelerometer; Micromechanical devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
  • Conference_Location
    Sevastopol, Crimea
  • Print_ISBN
    978-966-335-166-7
  • Electronic_ISBN
    978-966-335-169-8
  • Type

    conf

  • DOI
    10.1109/CRMICO.2008.4676326
  • Filename
    4676326
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3397995