DocumentCode
3398376
Title
Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser
Author
Jong-Moo Lee ; Ki-Young Um ; Ki-Gwan Han ; Jun-Ho Jang ; Tae-Kyung Yoo
Author_Institution
Laser Lab., LGIS R&D Center, Kyoungki, South Korea
Volume
2
fYear
1999
fDate
Aug. 30 1999-Sept. 3 1999
Firstpage
366
Abstract
Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe and cut the materials to be used for various applications, while it has a problem of abrasion of the harder material itself and a problem of limit in shape of cut. The material is also known to be cut by the laser with very high peak power or with a wavelength possible to be easily absorbed in the material. But the lasers are usually accompanied with an economical problem of their high cost. We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface.
Keywords
cutting; laser materials processing; optical windows; sapphire; sparks; transparency; Al/sub 2/O/sub 3/; Nd:YAG laser; Q-switched laser; abrasion; buffer materials; cut shape; cutting; diamond; economical problem; hard material; hard materials; industrial applications; mechanical contact; metal surface; optical windows; sapphire wafer; scribing; semiconductor emitting device; sparks; transparent materials; wavelength; Laser beam cutting; Optical buffering; Optical devices; Optical materials; Power lasers; Semiconductor lasers; Semiconductor materials; Shape; Stimulated emission; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1999. CLEO/Pacific Rim '99. The Pacific Rim Conference on
Conference_Location
Seoul, South Korea
Print_ISBN
0-7803-5661-6
Type
conf
DOI
10.1109/CLEOPR.1999.811471
Filename
811471
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