DocumentCode
3399679
Title
Preparation of TiO films by Cathode Multi Arc Ion and its Performance
Author
Fan, Duojin ; Fan, Duowang ; Wang, Chenglong ; Ming, Lingxiao ; Zhao, Lin ; Liu, Hongzhong
Author_Institution
Lanzhou Dachen Automatic Control Syst. Co., Lanzhou
fYear
2007
fDate
July 29 2007-Aug. 11 2007
Firstpage
258
Lastpage
259
Abstract
TiO films were prepared by custom-made Cathode Multi Arc Ion equipment. Experimental test results reveal that our equipment can easly deposite big area scale TIO, particle size is in nanometer scale .
Keywords
X-ray chemical analysis; crystal microstructure; ion plating; particle size; scanning electron microscopy; surface topography; thin films; titanium compounds; TiO; X-ray energy depressives spectrometers; cathode multi arc ion equipment; film composite; film microstructure; particle size; scanning electron microscope; surface topography; Automatic control; Cathodes; Coatings; Control systems; Materials science and technology; Optical films; Scanning electron microscopy; Substrates; Vacuum technology; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location
Beijing
Print_ISBN
978-1-4244-1591-5
Type
conf
DOI
10.1109/INOW.2007.4302980
Filename
4302980
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