• DocumentCode
    3401192
  • Title

    Properties and technology of sputtering of yttrium iron garnet films for spin-wave electronics

  • Author

    Nikolaychuk, G.A. ; Yakovlev, S.V. ; Lutsev, L.V. ; Andreev, A.N. ; Filimonov, V.V.

  • Author_Institution
    Res. Inst. "Ferrite-Domen", St. Petersburg
  • fYear
    2008
  • fDate
    8-12 Sept. 2008
  • Firstpage
    552
  • Lastpage
    553
  • Abstract
    Deposition of yttrium iron garnet films produced by magnetron sputtering are considered. The main consideration is paid to technology methods to obtain stoichiometric composition of sputtered films.
  • Keywords
    ferromagnetic materials; magnetic thin films; sputter deposition; yttrium compounds; Y3Fe5O12; magnetron sputtering; spin-wave electronics; stoichiometric composition; Garnet films; Iron; Magnetic analysis; Magnetic films; Performance analysis; Solids; Sputter etching; Sputtering; Surface contamination; Yttrium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
  • Conference_Location
    Sevastopol, Crimea
  • Print_ISBN
    978-966-335-166-7
  • Electronic_ISBN
    978-966-335-169-8
  • Type

    conf

  • DOI
    10.1109/CRMICO.2008.4676499
  • Filename
    4676499
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3401192