• DocumentCode
    3401378
  • Title

    Nanostructures of Si/SiO2/metal systems with swift heavy ion tracks

  • Author

    Kaniukov, E.Yu. ; Demyanov, S.E. ; Petrov, A.V.

  • Author_Institution
    Sci.-Practical Mater. Res. Centre, NAS of Belarus, Minsk
  • fYear
    2008
  • fDate
    8-12 Sept. 2008
  • Firstpage
    577
  • Lastpage
    578
  • Abstract
    Structures on the base of n-Si/SiO2 with nanopores in silicon dioxide layers filled with Cu and Ni particles are prepared by means of the swift heavy ion track technology, and investigated. A selectivity of nanopores filling with metals is shown. Current-voltage characteristics of the studied structures are carried out and a feasibility of the TEMPOS technology application for a creation of magnetically sensitive structures is presented.
  • Keywords
    copper; elemental semiconductors; ion beam effects; nanoporous materials; nickel; silicon; silicon compounds; Cu; Ni; Si-SiO2; TEMPOS technology; current-voltage characteristics; magnetically sensitive structures; metal systems; nanopores; nanostructures; silicon dioxide layers; swift heavy ion tracks; Etching; Helium; IEEE catalog; Inorganic materials; Microwave technology; Nanostructured materials; Nanostructures; Organizing; Semiconductor materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
  • Conference_Location
    Sevastopol, Crimea
  • Print_ISBN
    978-966-335-166-7
  • Electronic_ISBN
    978-966-335-169-8
  • Type

    conf

  • DOI
    10.1109/CRMICO.2008.4676510
  • Filename
    4676510
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3401378