DocumentCode
3402651
Title
Measuring information signals in microwave micro- and nanodiagnostics of semiconductor materials and structures
Author
Gordienko, Y.E. ; Petrov, V.V. ; Slipchenko, N.I.
Author_Institution
Kharkiv Nat. Univ. of Radioelectron., Kharkiv
fYear
2008
fDate
8-12 Sept. 2008
Firstpage
722
Lastpage
723
Abstract
In this work results of theoretical and the experimental researches directed on development of microwave microscopy of semiconductor materials and structures are given. The basic attention is given to formation of theoretical representation of the signals of measuring information which is put in the basis of the new development connected.
Keywords
microscopy; microwave measurement; semiconductor materials; information signal measurement; microwave micro; microwave microscopy; semiconductor material nanodiagnostic; Erbium; Microwave measurements; Nanostructured materials; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
Conference_Location
Sevastopol, Crimea
Print_ISBN
978-966-335-166-7
Electronic_ISBN
978-966-335-169-8
Type
conf
DOI
10.1109/CRMICO.2008.4676573
Filename
4676573
Link To Document