DocumentCode
3403656
Title
Surface-micromachined micro-XYZ stages for free-space micro-optical bench
Author
Lin, L.Y. ; Shen, J.L. ; Lee, S.S. ; Wu, M.C.
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fYear
1996
fDate
5-9 Aug. 1996
Firstpage
37
Lastpage
38
Abstract
The surface-micromachined free-space micro-optical bench (FS-MOB) has demonstrated its potential for monolithically integrating entire micro-optical systems on a single chip. In this paper, we propose a novel integrated XYZ stage with three degrees of freedom for precise on-chip optical alignment as well as input/output coupling for the FS-MOB.
Keywords
integrated optics; laser beams; lenses; micromachining; optical fabrication; beam steering device; free-space micro-optical bench; input/output coupling; integrated XYZ stage; micro-Fresnel lens; monolithic integration; on-chip optical alignment; surface-micromachined micro-XYZ stages; Actuators; Drives; Integrated optics; Laser beams; Lenses; Micromirrors; Mirrors; Optical beams; Optical sensors; Semiconductor lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location
Keystone, CO, USA
Print_ISBN
0-7803-3175-3
Type
conf
DOI
10.1109/LEOSST.1996.540784
Filename
540784
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