Title :
Design and Analysis of the Micro Force Sensor in the Apparatus for Micro Friction Testing
Author :
Yu, Huadong ; Li, Yiquan ; Xu, Jinkai ; Zhao, Ping
Author_Institution :
Changchun Univ. of Sci. & Technol., Jilin
Abstract :
In this paper, a novel micro force sensor in the micro friction testing apparatus is designed and analyzed. The sensor is fabricated using the parallel plate-spring. It consists of two groups of springs, one is horizontally parallel and the other is vertically. Thus, it can be used to measure the normal and friction force simultaneously. The sensor has low cost, high precision and reliability.
Keywords :
force sensors; friction; microsensors; plates (structures); reliability; springs (mechanical); friction force; micro force sensor; micro friction testing apparatus; microtribology; parallel plate-spring; reliability; Atomic force microscopy; Atomic measurements; Automatic testing; Force measurement; Force sensors; Friction; Instruments; Mechatronics; Micromechanical devices; Springs; Micro friction; Microtribology; Sensor;
Conference_Titel :
Mechatronics and Automation, 2007. ICMA 2007. International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4244-0828-3
Electronic_ISBN :
978-1-4244-0828-3
DOI :
10.1109/ICMA.2007.4303835
