Title :
Robust QFT control of a three-axis nano-positioning stage
Author :
Tsai, Meng-Shiun ; Luo, Quan-Ren
Author_Institution :
Dept. of Mech. Eng., Nat. Chung Cheng Univ., Ming-Hsiung
fDate :
June 30 2008-July 2 2008
Abstract :
A novel three-axis nano-positioning device is proposed which consists of an X-Y table and a rotational stage on top of the X-Y table. Each stage is actuated by piezoactuator and the motion is sensed by laser displacement sensors. The simplified model of the stage was derived and the finite element model was developed to analyze the motion of the stage. Then the QFT algorithm was proposed to design robust controllers for the stage. It was found that the rise time of the stage is about 0.1 sec for a 10 um input. The positioning accuracy can achieve is within 0.1 um.
Keywords :
finite element analysis; nanopositioning; robust control; X-Y table; finite element model; laser displacement sensors; piezoactuator; robust QFT control; three-axis nano-positioning stage; Atomic force microscopy; Atomic measurements; Fasteners; Force measurement; Laser modes; Mechanical engineering; Nanopositioning; Piezoelectric actuators; Robust control; Semiconductor process modeling; Robust QFT control; nano-positioning stage;
Conference_Titel :
Industrial Electronics, 2008. ISIE 2008. IEEE International Symposium on
Conference_Location :
Cambridge
Print_ISBN :
978-1-4244-1665-3
Electronic_ISBN :
978-1-4244-1666-0
DOI :
10.1109/ISIE.2008.4677044
