Integration of RF MEMS switches with pHEMT MMICs on GaAs

Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS) switches are highly linear, low loss, inherently broadband with low power consumption. Given its nearly ideal technical switching specifications, highly complex, agile switching circuits using RF MEMS will be possible. RF MEMS switches integrated with Monolithic Microwave Integrated Circuits (MMIC) on GaAs platform will further exploit the strengths of both GaAs based MMIC technology with the near ideal switching capabilities of RF MEMS switches. In this talk, the fabrication process will be discussed. Experimental results on the integration of RF MEMS switches with GaAs pHEMT MMICs will be presented. Our work demonstrates the technology capabilities to extend the current MEMS technology towards fully MMIC-RF MEMS compatibility on GaAs platform.