H-infinity optimal control enabled micro-force sensing

This paper describes a micro-force sensing device where a H-infinity control scheme is used to actively balance the external force and provide the measurement. The force sensing principle is based on the active control of the electrostatic bipolar actuator (comb-drive) within the sensor. An external load force acts on the sensor and displaces the probe. The controller is set to balance the applied force and keep the probe at its null position. As a result, the applied force is obtained in real time from the balancing control signal. A meso-scale prototype has been built as proof-of-concept and an especially designed H-infinity control allows for a measurement accuracy of 0.4 μN over a large range [-400+400] μN.