DocumentCode :
3416225
Title :
A transitive algorithm for self-calibration of two-dimensional ultra-precision stages
Author :
Yu Zhu ; Chuxiong Hu ; Jinchun Hu ; Zheng Chen
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
fYear :
2011
fDate :
3-7 July 2011
Firstpage :
594
Lastpage :
598
Abstract :
Self-calibration is one of the important approaches to obtain greater measurement accuracy in precision engineering applications. This paper presents a simple method for self-calibration of two-dimensional ultra-precision stages while previous attempts to solve this problem are often quite complicated or under some impractical assumptions. Specifically, by measuring a rigid artifact at three locations on the stage, a transitive algorithm based on direct point-to-point comparison is constructed to separate the stage error from the artifact error under some conditions. The proposed method also provides a framework for researchers to solve the self-calibration problem from another perspective. The algorithm has been tested by computer simulation and the simulation results show that the proposed method can achieve accurate self-calibration.
Keywords :
calibration; precision engineering; computer simulation; point-to-point comparison; precision engineering; self-calibration; transitive algorithm; two-dimensional ultra-precision stages; Attenuation measurement; Calibration; Measurement uncertainty; Metrology; Noise; Noise measurement; Position measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics (AIM), 2011 IEEE/ASME International Conference on
Conference_Location :
Budapest
ISSN :
2159-6247
Print_ISBN :
978-1-4577-0838-1
Type :
conf
DOI :
10.1109/AIM.2011.6027114
Filename :
6027114
Link To Document :
بازگشت