DocumentCode :
3418775
Title :
Application of real-time expert systems in semiconductor manufacturing
Author :
Subbiah, Vasu ; Bodenstab, Jeff
fYear :
1992
fDate :
30 Sep-1 Oct 1992
Firstpage :
90
Lastpage :
95
Abstract :
Some requirements of a real-time expert system and applications in process control, statistical process control, and scheduling are presented. Combining the expert system capability with object oriented modeling, one can build powerful applications in a relatively short time span, thus cutting down the time taken to implement a process control system. Also, when implemented, an expert-system-based dynamic scheduling system should generate far superior results than when only long-term planning is performed and short-term scheduling is done on an ad hoc basis
Keywords :
Application software; Control systems; Expert systems; Graphical user interfaces; Manufacturing processes; Object oriented programming; Operating systems; Real time systems; Relational databases; Semiconductor device manufacture;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-0740-2
Type :
conf
DOI :
10.1109/ASMC.1992.253844
Filename :
253844
Link To Document :
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