Title :
Enhanced field emission with self-alingned carbon nanotube emitters grown by RAP process
Author :
Jung Soo Kang ; Su Woong Lee ; Seon Yong Park ; Ha Rim Lee ; Jin Jang ; Kyu Chang Park
Author_Institution :
Dept. of Inf. Display & Adv. Display Res. Center, Kyung Hee Univ., Seoul, South Korea
Abstract :
We optimized the triode structure for field emission with carbon nanotube emitters grown with resist-assisted pattering process. Carbon nanotube emitters were grown on silicon substrate and patterned with grid mesh for structural optimization. The gate mesh was self-aligned with the carbon nanotube for lower leakage current, resulting higher electron emission current and transmission ratio. With the optimized triode structure, we fabricated field emission lamp and obtain luminance of 23,000 cd/m2.
Keywords :
carbon nanotubes; electron field emission; leakage currents; triodes; RAP process; electron emission current; enhanced field emission; fabricated field emission lamp; gate mesh; grid mesh; leakage current; resist-assisted patterning process; self-aligned carbon nanotube emitters; silicon substrate; structural optimization; transmission ratio; triode structure; Anodes; Carbon dioxide; Cathodes; Logic gates; Plasma measurements; RNA; CNT; Field emission lamp; RAP; Triode;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
Conference_Location :
Roanoke, VA
DOI :
10.1109/IVNC.2013.6624742
