DocumentCode
3420232
Title
Non-robotic fabrication of packaged microsystems by shape-and-solder-directed self-assembly
Author
Zheng, Wei ; Chung, Jue-Boon ; Jacobs, Heiko O.
Author_Institution
Dept. of Electr. & Comput. Eng., Minnesota Univ., USA
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
8
Lastpage
11
Abstract
The non robotic fabrication of packaged microsystems that contain non-identical parts has been accomplished by a directed self-assembly process. The self-assembly process uses geometrical shape recognition to identify different components and subsequent bond formation between liquid solder and metal coated areas to form mechanical and electrical connections. We applied this concept of shape recognition and subsequent formation of contacts to assemble and package microsystems that contained three building blocks: a silicon carrier, a semiconductor device segment, and a glass encapsulation unit. As semiconductor device segments, we tested 200 micrometer sized light emitting diodes. The microsystems self-assembled by sequentially adding parts to the assembly solution. Six hundred AlGaInP/GaAs light emitting diode segments self-assembled onto device carriers in 2 minutes without defects. Encapsulation units self-assembled onto the LED carrier assemblies to form a three-dimensional circuit path to operate the final device.
Keywords
encapsulation; micromechanical devices; self-assembly; semiconductor device packaging; 2 mins; 200 micron; LED carrier assemblies; bond formation; electrical connections; encapsulation units; geometrical shape recognition; glass encapsulation unit; light emitting diodes; liquid solder; mechanical connections; metal coated areas; nonrobotic fabrication; packaged microsystems; semiconductor device segment; shape-and-solder-directed self-assembly; silicon carrier; Assembly; Bonding; Encapsulation; Fabrication; Light emitting diodes; Packaging; Robots; Self-assembly; Semiconductor devices; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453854
Filename
1453854
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