• DocumentCode
    3420232
  • Title

    Non-robotic fabrication of packaged microsystems by shape-and-solder-directed self-assembly

  • Author

    Zheng, Wei ; Chung, Jue-Boon ; Jacobs, Heiko O.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Minnesota Univ., USA
  • fYear
    2005
  • fDate
    30 Jan.-3 Feb. 2005
  • Firstpage
    8
  • Lastpage
    11
  • Abstract
    The non robotic fabrication of packaged microsystems that contain non-identical parts has been accomplished by a directed self-assembly process. The self-assembly process uses geometrical shape recognition to identify different components and subsequent bond formation between liquid solder and metal coated areas to form mechanical and electrical connections. We applied this concept of shape recognition and subsequent formation of contacts to assemble and package microsystems that contained three building blocks: a silicon carrier, a semiconductor device segment, and a glass encapsulation unit. As semiconductor device segments, we tested 200 micrometer sized light emitting diodes. The microsystems self-assembled by sequentially adding parts to the assembly solution. Six hundred AlGaInP/GaAs light emitting diode segments self-assembled onto device carriers in 2 minutes without defects. Encapsulation units self-assembled onto the LED carrier assemblies to form a three-dimensional circuit path to operate the final device.
  • Keywords
    encapsulation; micromechanical devices; self-assembly; semiconductor device packaging; 2 mins; 200 micron; LED carrier assemblies; bond formation; electrical connections; encapsulation units; geometrical shape recognition; glass encapsulation unit; light emitting diodes; liquid solder; mechanical connections; metal coated areas; nonrobotic fabrication; packaged microsystems; semiconductor device segment; shape-and-solder-directed self-assembly; silicon carrier; Assembly; Bonding; Encapsulation; Fabrication; Light emitting diodes; Packaging; Robots; Self-assembly; Semiconductor devices; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-8732-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2005.1453854
  • Filename
    1453854