Title :
3D multilayer monolithic microwave (M/sup 3/) passive transmitter module
Author :
Ferendeci, A.M. ; Bosui Liu ; Ho Huang ; Mah, M. ; Lee Liou
Author_Institution :
Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA
Abstract :
An X-band multilayer monolithic microwave (M/sup 3/) filter and patch antenna were designed, processed and characterized to demonstrate a three dimensional X-band passive transmitter. Multiple layers of polyimide and metal were deposited on a metalized silicon wafer. A filter and a patch antenna which were processed at two different layers were coupled through a slot on a common ground plane. The X-band 3D-M/sup 3/ passive transmitter was characterized for the radiation patterns.
Keywords :
MMIC; antenna phased arrays; antenna radiation patterns; integrated circuit interconnections; microstrip antenna arrays; microwave filters; transmitting antennas; 3D multilayer monolithic microwave circuit; X-band; common ground plane; metalized silicon wafer; microwave filter; passive transmitter module; patch antenna; polyimide multiple layers; radiation patterns; Coplanar waveguides; Coupling circuits; Dielectrics; Integrated circuit interconnections; MMICs; Microwave filters; Nonhomogeneous media; Patch antennas; Silicon; Transmitters;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.779798
