Liquid delivery MOCVD of PLT for pyroelectric detectors

Pb_1-xLa_xTi_1-x/4O₃ (PLT) films have shown promise for uncooled infrared detector applications. A metalorganic chemical vapor deposition (MOCVD) process has been developed to deposit PLT at 535°C using the liquid delivery technique on two inch Pt/ZrO₂/Si substrates. Metalorganic β-diketonate and mixed β-diketonate-alkoxide precursors were flash vaporized and delivered into a large area MOCVD chamber and high quality crystalline perovskite films were deposited with La contents of 0.02⩽×⩽0.28. Room temperature dielectric constant varied between 400 940 for films ~1200 Å thick and increased with increasing La content. Pyroelectric measurements were carried out using the Byer-Roundy technique. The pyroelectric coefficients were found to depend on film orientation which varied between [100] and [111] with the Pb/Ti ratio; values between 6-13 nC/cm²K were observed