DocumentCode :
3421733
Title :
A novel MEMS device for high resolution force and displacement measurement
Author :
Samuel, B.A. ; Desai, A.V. ; Haque, M.A.
Author_Institution :
Pennsylvania State Univ., University Park, PA, USA
fYear :
2005
fDate :
30 Jan.-3 Feb. 2005
Firstpage :
259
Lastpage :
262
Abstract :
We present the design and fabrication of a MEMS device for high resolution force and displacement measurements. Quantitative and qualitative measurements can be performed in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. The device exploits the amplification of displacement and attenuation of structural stiffness in the post-buckling region of slender silicon beams to obtain pico-Newton force and nanometer displacement resolution. The specimen deformation can be read in optical microscopes, thus avoiding complex displacement sensing mechanisms. The device can be used for characterization of carbon nanotube-polymer interfaces, nanoscale thin films and mechanical testing of single biological cells.
Keywords :
displacement measurement; force measurement; micromechanical devices; scanning electron microscopy; scanning tunnelling microscopy; transmission electron microscopy; MEMS device; SEM; STM; TEM; carbon nanotube-polymer interfaces; displacement amplification; displacement measurement; force measurement; force-displacement sensors; mechanical testing; nanometer displacement resolution; nanoscale thin films; optical microscopes; pico-Newton force; qualitative measurements; quantitative measurement; single biological cells; slender silicon beams; structural stiffness; Displacement measurement; Fabrication; Force measurement; Force sensors; Microelectromechanical devices; Nanobioscience; Nanoscale devices; Optical attenuators; Optical microscopy; Scanning electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN :
1084-6999
Print_ISBN :
0-7803-8732-5
Type :
conf
DOI :
10.1109/MEMSYS.2005.1453916
Filename :
1453916
Link To Document :
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