Title :
A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging
Author :
Chen, Jack ; Engel, Jonathan ; Chen, Nannan ; Liu, Chann
Author_Institution :
Micro & Nanotechnology Lab., Illinois Urbana-Champaign Univ., IL, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
We report the development of an out of plane hot wire flow sensor array fabricated using robust three dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot wire anemometer array for flow imaging.
Keywords :
anemometers; boundary layer turbulence; flow measurement; operational amplifiers; 3D assembly; JFET operational amplifier; airflow; boundary layer flow imaging; constant temperature mode; hot wire anemometer array; monolithic integrated array; out-of-plane hot wire flow sensors; Assembly; Bridge circuits; Fluid flow measurement; Image sensors; Loss measurement; Micromachining; Sensor arrays; Silicon; Temperature sensors; Thermal sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453926
