DocumentCode
3422306
Title
Design and fabrication of a microfluid angular rate sensor
Author
Zhou, Jian ; Yan, Guizhen ; Zhu, Yong ; Xiao, Zhyong ; Fan, Jie
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
363
Lastpage
366
Keywords
Automotive engineering; Cameras; Costs; Fabrication; Inertial navigation; Micromechanical devices; Robot sensing systems; Robot vision systems; Solids; Tail;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453942
Filename
1453942
Link To Document