Title :
Challenges in MEMS parametric macro-modeling based on mode superposition technique
Author :
Kolchuzhin, Vladimir ; Dötzel, Wolfram ; Mehner, Jan
Author_Institution :
Dept. of Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz
Abstract :
Computational approaches, opportunities and challenges in reduced order modelling based on mode superposition method of the coupled electrostatic-structural domains, including effective model generation and geometrical parameterization, as well as physical and system design of MEMS component are presented and discussed.
Keywords :
micromechanical devices; MEMS component design; MEMS parametric macromodeling; coupled electrostatic-structural domain; mode superposition technique; Capacitance; Capacitive sensors; Circuit simulation; Computational modeling; Electrostatics; Micromechanical devices; Quantum computing; Read only memory; Residual stresses; Solid modeling;
Conference_Titel :
Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on
Conference_Location :
Delft
Print_ISBN :
978-1-4244-4160-0
Electronic_ISBN :
978-1-4244-4161-7
DOI :
10.1109/ESIME.2009.4938481
