Microactuated micro-XYZ stages for free-space micro-optical bench

A novel microactuated micro-XYZ stage with large travel distance and fine positioning capability has been demonstrated using the surface-micromachining technology. The micro-XYZ stage consists of three in-plane translation stages driven by integrated scratch drive actuators. Two vertically stacked 45° micromirrors in orthogonal directions are employed to achieve vertical beam adjustment without using vertical actuators. Large travel distance (>30 μm) and fine moving steps (11 nm) have been achieved experimentally in all three directions. The micro-XYZ stage can be monolithically integrated with the surface-micromachined microlenses, or other out-of-plane micro-optical elements, for optical alignment or reconfiguration in free-space micro-optical benches (FSMOB)