Title :
Assembling process for microscopic components using magnetic force
Author :
Ota, Hitoshi ; Araki, Takeshi ; Takeda, Munehisa ; Narumiya, Hiromu ; Ohara, Takao
Author_Institution :
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
Current methods of assembling micromachines, for example handling components using a manipulator, require accurate component positioning. In addition, it is difficult to establish electrical connections between the components with these methods. To solve these problems, this paper investigates a process for assembling microscopic components using magnetic polarity and attraction. The aim is to conduct basic research into the processes of assembling multiple components in a short time. First, the components are positioned tentatively by generating torque in the components due to magnetic polarity. After being positioned accurately by means of the tapers, the components can be connected mechanically and electrically. To study the validity of this concept, an assembly test was conducted. Bonding elements and assembly test equipment were fabricated for this test in order to examine the positioning accuracy achieved when the components were joined
Keywords :
magnetic devices; microassembling; micromechanical devices; permanent magnets; position control; small electric machines; assembling; attraction; bonding; component positioning; electrical connections; handling; magnetic force; magnetic polarity; manipulator; micromachines; microscopic components; positioning accuracy; Actuators; Assembly systems; Bonding; Magnetic force microscopy; Magnetic forces; Magnetic separation; Permanent magnets; Substrates; Testing; Torque;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581805