Title :
A fully integrated CMOS-MEMS pressure sensor with on-chip Δ-Σ analog-to-digital converter
Author :
Wisland, Dag T. ; øysted, Kurianne
Author_Institution :
Dept. of Informatics, Oslo Univ., Norway
Abstract :
This paper describes a fully integrated CMOS-MEMS pressure sensor implemented in a standard 0.6 μm process from AMS. The fabricated chip includes all necessary components from pressure sensor to A/D-converter and decimation filter. The pressure sensitive diaphragm is fabricated using one single postprocessing step. Theoretical background is provided along with simulated results laying the fundament for the implemented CMOS design. Measured results will be available in short time.
Keywords :
CMOS integrated circuits; biomedical engineering; filters; microsensors; pressure sensors; sigma-delta modulation; decimation filter; fully integrated CMOS-MEMS pressure sensor; on-chip Δ-Σ analog-to-digital converter; Analog-digital conversion; Delay; Frequency modulation; Intrusion detection; Inverters; MOSFETs; Piezoresistance; Ring oscillators; Silicon; Stress;
Conference_Titel :
Biomedical Circuits and Systems, 2004 IEEE International Workshop on
Print_ISBN :
0-7803-8665-5
DOI :
10.1109/BIOCAS.2004.1454157
