Title :
Thin-film microstrip lines for MM and sub-MM/wave on-chip interconnects
Author :
Heiliger, H.-M. ; Nagel, M. ; Roskos, H.G. ; Kurz, H. ; Schnieder, F. ; Heinrich, W.
Author_Institution :
Inst. fur Halbleitertech. II, Tech. Hochschule Aachen, Germany
Abstract :
Thin-film microstrip lines with a polymer dielectric between ground and signal conductor are proven to be an attractive alternative to coplanar waveguides for (sub)-MM-wave interconnects. Both simulation and electrooptic characterization reveal negligible modal dispersion up to 1000 GHz and low attenuation even if the lines are realized on low-resistivity substrates.
Keywords :
frequency-domain analysis; integrated circuit interconnections; microstrip lines; millimetre wave integrated circuits; submillimetre wave integrated circuits; 1000 GHz; MM-wave interconnects; electrooptic characterization; low-resistivity substrates; on-chip interconnects; polymer dielectric; sub-MM interconnects; thin-film microstrip lines; Attenuation; Conductors; Coplanar waveguides; Dielectric substrates; Dielectric thin films; Impedance; Integrated circuit interconnections; Microstrip; Pulse measurements; Transistors;
Conference_Titel :
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location :
Denver, CO, USA
Print_ISBN :
0-7803-3814-6
DOI :
10.1109/MWSYM.1997.602823
