Title :
Transient TAV And Capacitance Measurements For Surface Characterization In GaAs And Si
Author :
Ostrovskii, I.V. ; Saiko, S.V.
Author_Institution :
Univ. of Kiev
Keywords :
Capacitance measurement; Electron traps; Gallium arsenide; Physics; Pulse measurements; Substrates; Surface acoustic waves; Time measurement; Ultrasonic variables measurement; Voltage;
Conference_Titel :
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location :
Moscow, Russia
DOI :
10.1109/ISSWAS.1994.662522